美国 KRI 线性霍尔离子源 eH Linear

型号

eHL400-2/ eHL400-3/ eHL400-4/ eHL400-5

供电

DC magnetic confinement

- 电压

40-200V VDC

- 阳极结构

模块化

电源控制

eHL-30010A

配置

-

- 阴极中和器

Filamentless

- 离子束发散角度

> 45° (hwhm)

- 阳极

标准或 Grooved

- 底座

移动或快接法兰

- 高度

10 cm

宽度

10 cm

- 长度

~ 100cm

-工艺气体

Ar, Xe, Kr, O2, N2, Others

Model

eHL 200-3

eHL 200-5

Height (nominal)

2.9” (7.4cm)

2.9” (7.4cm)

Width (nominal)

3.3” (8.4cm)

3.3” (8.4cm)

Length (nominal)

Determined by number of modules & application

Determined by number of modules & application

Cathode/Neutralizer

Yes

Yes

Anode module

Yes

Yes

Filamentless

Yes

Yes

Orientation

Vertical / Horizontal

Vertical / Horizontal

Process gases

Inert, reactive, & organic

Inert, reactive, & organic

Power controller

eH Plasma Power Pack

eH Plasma Power Pack